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Physical and Surface Measurement Branch



TEM1 Room
Room No.102, BLDG 22

JEM-2000EXII

JEM-2000EX II (JEOL)
Resolution lattice Image 0.102 nm
Point Image 0.21 nm
Accelerating Voltage 200 kV
Magnification 4,000-600,000
Camera Length 100-2,000mm
Specimen Holder Single Tilt type
Double Tilt type (±10o)


TEM2 Room
Room No.214 & 414, BLDG 22

JEM-2010HR JEM-2100F EM-09100IS

JEM-2010HR (JEOL)
Resolution lattice Image 0.14 nm
Point Image 0.23 nm
Accelerating Voltage 80 - 200 kV
Magnification Mag Mode x2,000-1,500,000
Low Mag Mode x50-6,000
SA Mag Mode x8,000-800,000
Camera Length SA Diff 80-2,000mm
HD Diff 4-80mm
HR Diff 333mm
Specimen Holder Single Tilt type
Double Tilt type (±25 / ±25o)
JEM-2100F (JEOL)
Resolution lattice Image 0.1 nm
Point Image 0.19 nm
Accelerating Voltage 120, 160 200 kV
Magnification Mag Mode x2,000-1,500,000
Low Mag Mode x50-6,000
SA Mag Mode x8,000-800,000
Camera Length SA Diff 80-2,000mm
HD Diff 4-80mm
HR Diff 333mm
Specimen Holder Single Tilt type
Double Tilt type (±30 / ±30o)
EM-09100IS (JEOL)
Accelerating Voltage 1 - 8 kV
Tilt Angle ±6o (0.1o step)
Beam Diameter 500 µm (FWHM)
Etching Rate 5 µm/min (Accelerating Voltage:8 kV, Si conversion)
Usig Gas Ar gas
Sample Size 2.8 mm(L) x0.5 mm(W) x0.1 mm(T)


TEM3 Room
Room No.122B & 909A, BLDG 2

JEM-z2500 EM-19500 JFD II

JEM-z2500 (JEOL)
Accelerating Voltage (MAX) 200 kV
Resolution Secondary Electron Image 0.5 nm
TEM lattice Image 0.1 nm
STEM Image 0.2 nm
Magnification SEI x100 - x20,000,000
STEM x100 - x20,000,000
TEM x500 - x20,000,000
Element Analysis EDS ( B - U )
EM-19500 JFD II (JEOL)
Temperature Control +40 - -170 oC
Sample Tilt 0 - 90 o
Material Pt-C, C




EPMA Room
Room No.402, BLDG 22

JCA-8800

JSM-7001F (JEOL)
Resolution 1.2 nm (30 kV), 3 nm (1 kV)
Magnification x10 - x1,000,000
Acceleration Voltage 0.5 - 30 kV
Irradiation Current Several pA - 200 nA
Reflected Electron Detector
EDS Thermofisher NSS type
EBSD TSL OIM type
JXA8530F (JEOL)
Element Analysis Range WDS : B - U, with 3 Channels
EDS : B - U, with 2 Channels
Sample Size (MAX) 100 mm x100 mm x50 mm(H)
Acceleration Voltage 1 - 30 kV
Range of Irradiation Current 10-12 x5 x10-7 A
Secondary Electron Resolution 3 nm (WD:11 mm, 30 kV)
Magnification x40 - x300,000
Reflected Electron Detector
EDS Thermofisher NSS type
JSPM-5200 (JEOL)
Resolution AFM, SPM atomic resolution
System Drift ≤0.05 nm/s
Measurement Mode AFM mode, STM mode
X-Y scanning Range 0 - 10 µm
Z Range 0 - 3 µm
Sample Size 10 mm x10 mm x3 mm(t)
X-Y Movement ±3 mm
Z Movemnt 5 mm




X-Ray Room
Room No.401, BLDG 22

RINT-2000

Smart Lab (RIGAKU)
X-rays Tube 9 kW, Cu Target
Scan Mode 2θ-θ
RINT-2100 (RIGAKU)
X-rays Tube 2 kW, Cu Target
Scan Mode 2θ-θ




AES Room
Room No.410, BLDG 22

JAMP7800

JAMP-9500F (JEOL)
Secondary Electron Resolution 3 nm (25 kV,10 pA)
Probe Diameter 8 nm (25 kV, 1 nA)
Acceleration Voltage 0.5 - 30 kV
Probe Current 10-11 - 2x10-7 A
Magnification x25 - x500,000
Analyzer HSA (Henispherical Analyzer)
Energy Resolution 0.05% - 0.6%
Sensitivity 840,000 cps, Cu-LMM, 10 kV, 10 nA
Acceleration Voltage (Ion Gun) 0.01 - 4 kV
Ion Current ≥2 µA (3 kV), ≥0.03 µA (10 V)
Pressure ≤5 x10-8 Pa




XPS Room
Room No.317, BLDG 22

PHI5000

PHI-5000 (ULVAC-PHI)
X-Ray Source Alanode with Convergent Monochromator
Spot Size 10 µm - 100 µm ±10 µm
Detector Hemispherical Multichannel Analyzer
Analysis Range For Binding Energy : 0 - 1,400 eV
FWHM : 0.5 eV (Ag 3d5/2 Peak)









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